Electronic gas is used widely in industry, which can be classified as pure gas, highly pure gas and special semiconductor material gas. Electronic gas is an important branch of special gas. It is indispensable raw material of the ultra-large scale integrated circuits, graphic display devices compound semiconductor devices, solar cells, optical fiber, etc., and also widely used in membrane, etching, doping, vapor deposition, diffusion and other processes.
Main electronic gases are as following: Silane, ammonia, carbon tetrafluoride, sulfur hexafluoride, hydrogen chloride, octafluorocyclobutane, methane, nitrous oxide, boron trichloride, hydrogen bromide, carbon monoxide gas, neon gas, krypton and etc.
This Y-ton cylinder is suitable to storage and distribution of high pure medium with its feature of safety, liability and low cost. We offer this kind of cylinders in various pressure and dimensions as per customer requirements.
Type:Y-ton cylinder
Diameter(mm):850
Capacity(L):440
Working pressure(Bar):15
Filling Medium:N2、He、SiH4、SF6、HN3、N2O、CL2、HCL
Certifications:TPED、ISO11120、GB
valve:CGA valves
Roughness:0.3~0.8μm
Feature:safety, liability and low cost
Moisture level:0.5~1ppm
Particle content(NVR):50~100mg/m2
Size:various pressure and dimensions as per customer requirements.
More Product or Size,please contact us for Inquiry!